Any F/A lab knows all of this as their stock in trade,
but a lot of it is not just choice of chemicals but also
time, temperature, agitation and so on, with some
dependence on the process which will lead to some
cut-and-try deprocessing.
If you're looking for a top view you don't really have
to worry about poly damage until the last (Py-M1)
ILD layer removal. This will probably be an HF dip
and can chew silicon, although not as fast as the
oxide.
This is something that, if you have a budget and
not an in-house lab with skilled technician, would best
be sent out to a lab that's capable.