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1)This is hot electron effect is due to the shrinking of technology. If we go on reducing the length of the gate,the electric field at the drain of the transistor increases(for a fixed drain voltage).
2)The field may become so high that electrons are imparted with enough energy to become what is termed as "hot". These electrons impact the drain,dislodging holes.If these electrons enter gateoxide, it will cause gate current.
3)This may lead to degradation of device parameters like thresold current, subthreshold current and transconductance.
This is can be reduced by introducing spacers in the design. This can be avoided by decreasing the voltage(But if u do this, the essence of vlsi is not fulfilled).
For more information U may refer to Solid State Electronic Devices by
Ben G Streetman & Sanjay Banerjee.
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