High performance MIM capacitor for RF BiCMOS/CMOS LSIs

[engrvip]

1. High performance MIM capacitor for RF BiCMOS/CMOS LSIs
Yoshitomi, T.; Ebuchi, Y.; Kimijama, H.; Ohguro, T.; Morifuji, E.; Momose, H.S.; Kasai, K.; Ishimaru, K.; Matsuoka, F.; Katsumata, Y.; Kinugawa, M.; Iwai, H.;
Bipolar/BiCMOS Circuits and Technology Meeting, 1999. Proceedings of the 1999
26-28 Sept. 1999 Page(s):133 - 136

 

[kumard35b]

Re: MIM capacitor

mim cap paper