HFSS for through silicon via parasitics extraction.

[sharathsatheesh]

Hello,
I am trying to model the equivalent RLC values of a through silicon via in HFSS. I am from material science background, hence I have limited knowledge in setting up simulations in HFSS.
My aim is to model the RLC values in the equivalent circuit, with respect to the physical dimensions (oxide thickness, diameter of via, depth of via etc.) How must I set up the simulation in order to extract these values? My doubts are on how to assign ports, boundaries and excitations in HFSS, so that the simulation is valid.
If anyone has experience setting up such a simulation, please help me answer these doubts.
Thanks and Regards,
Sharath P Satheesh

 

[mkonca]

I am sure you will be able to get more help if you first try to make it work and ask more specific questions when you get stuck.

 

[sharathsatheesh]

Hi,
I have solved the issues I was facing before. You were right. I just had to read the HFSS manual.
-Sharath