Good book/tutorials explaining layout and manufacturing?

[design_oriented]

Hi Guys,

Are there any good books/tutorials (other than the standard books like Kamran,Baker,etc.) that explain in detail how some layouts can be sensitive to process?

Most stuff I have read just mentions basic stuff like "add dummy structures for litho and etching, etc.) but do not go into details of how this really affects the chip.

Thanks.

 

[erikl]

I think Alan Hasting's book "Art of Analog Layout" would give a good overview.