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Gate Leakage in CMOS Cap

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dhasmana

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what is the order of gate leakage current in 140nm CMOS process (approx fig.)
per pf of CMOS cap............ 1nA or 10nA (rough idea!)

what are the parameters on which gate leakage depend?Oxide thickness?
DOes it increase with temp?

Regards.
 

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