Fabrication Process Of EEPROM

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wisepie

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thesis on eeprom

I need some tutorials/notes/papers/books for fabrication of 1 cell EEPROM which compatible with CMOS process (For my thesis). Can someone help me?
 

there are a few online - search google. however, EEPROM needs a tunnel gate which is an extension of the CMOS process. it may be compatible, but you don't get it for free.

here's a paper
**broken link removed**
 

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