Fabricating vertical mosfet using silvaco (atlas)

[shafquat06]

Hi guys! I have an assignment on fabricating a conventional vertical mosfet (without silicidation) with variable channel length, source/drain junction at 200 nm, gate oxide thickness of 2 nm gate poly thickness of 150 nm. I have very limited knowledge of silvaco so a code along with explanation would be highly appreciated . thanks in advance

 

[dick_freebird]

Silvaco has a broad set of tools, none of which fabricate a
part physically. Some of them permit you to simulate the
fabrication of a device from litho / implant / drive process
"run sheets" and others will let you take the derived mesh
and extract electrical signatures, and so on.

You are not going to get the code from them, they sell
tools. You might obtain example decks (and a lot of examples
are provided with the tools install).

Your university evidently has the tools, so they should have
the docs for you to study. If you find the docs and it looks
like they're in a software hierarchy, then root around for
/examples and the pertinent tool (which you'd determine by
skimming the docs - far-front-end, I don't mess with).

 

[shafquat06]

Thank you dick_freebird for your reply. I might have stated my problem incorrectly...i have worked with atlas on simulating a n-mos device but for this assignment we have to simulate the fabrication process of a v-mos using athena. Will the docs have examples on ion implantation, diffusion, etching, deposition and litho? I'll be looking at them later today. Can you give me a rough idea on how to proceed?