Differences between Polysilicon 1 and polysilicon 2

Status
Not open for further replies.
B

biolycans

Member level 2
Joined
Aug 24, 2013
Messages
50
Helped
0
Reputation
0
Reaction score
0
Trophy points
6
Activity points
478
Hi,

Do you know the differences between the polysilicon 1 and the polysilicon 2 ?

Why I used this two materials to form a capacitor ? is there a reason or an advantage between the other materials (Metal 1, 2, 3 , etc) ?

Thank you !

Regards,

JC
 

Poly1 is the usual CMOS gate electrode. It's going to be
there on any CMOS flow.

Poly2 is a cheap and easy way to get an isolated capacitor
for "mixed signal" applications. You can deposit or grow a
thin dielectric, lay down poly2, and there's your "POP cap".

This dielectric is meant to maximize areal capacitance,
while the poly-M1, M1-M2, M2-M3, ... dielectrics are
aimed at the oppposite (low interlayer capacitance) on
the one hand, but limited by things like via-filling, step
coverage and simple time-in-tube cost to a less than
infinite thickness.
 

Status
Not open for further replies.

Similar threads

Menu
Log in
Register
Cookies are required to use this site. You must accept them to continue using the site. Learn more…