Feb 25, 2017 #1 W wighou Member level 3 Joined Jun 14, 2010 Messages 56 Helped 3 Reputation 6 Reaction score 3 Trophy points 1,288 Activity points 1,668 Hello, My question is quite simple. What does mean "Ceramic AUX chuck" on a RF Probe Station? What is the function? Thanks, manu
Hello, My question is quite simple. What does mean "Ceramic AUX chuck" on a RF Probe Station? What is the function? Thanks, manu
Feb 25, 2017 #2 KlausST Advanced Member level 7 Joined Apr 17, 2014 Messages 25,158 Helped 4,868 Reputation 9,757 Reaction score 5,536 Trophy points 1,393 Activity points 168,346 Hi, I don´t know .... but I´m able to do an internet search "Ceramic AUX chuck" I got some results. One is: https://www.cascademicrotech.com/files/EPS200RF-TR.pdf It says: Integrated ceramic AUX chuck of the RF chuck holds the calibration substrate at comparable with the wafer height (Fig. 7). It eliminates the need to re-adjust contact height between calibration and measurement. Klaus
Hi, I don´t know .... but I´m able to do an internet search "Ceramic AUX chuck" I got some results. One is: https://www.cascademicrotech.com/files/EPS200RF-TR.pdf It says: Integrated ceramic AUX chuck of the RF chuck holds the calibration substrate at comparable with the wafer height (Fig. 7). It eliminates the need to re-adjust contact height between calibration and measurement. Klaus