pcm wafer test data
The process control monitor (PCM) refers to the suite of test structures usually placed in the scribeline (alternatively named kerf, street or test key) separating product die on the wafer.
These test structures include such for measuring electrical parameters of active devices (Vth, gate diode breakdown, Idsat, channnel length/width reduction, drain/source series resistance, etc), properties of passive devices (area capacitances, sheet resistance (diffusion, poly, metal), contact/via resistance, etc.) and in- line relevant parameters such as linewidth control, alignment, etc.
Regards,
C.