Hi,
I want understand the rule deck file,any sources...pdf
for example ...
VARIABLE VIA2_W_2 0.5 ----> do this means, VIA in layer2 width of 0.5um
VARIABLE VIA1_S_6 0.35
VARIABLE M2_W_5 6
First, you should find the place that the variable VIA2_W_2 is used. then you could know the value is for width or space.
in my guess, VIA2 is just VIA2 (via name) not VIA in layer2. W means Width.
VARIABLE VIA2_W_2 0.5 ---> VIA2 is for M2-M3 via, W may be for width, and 0.5 can be dimension, but '2' may not necessarily represent layer2(I think its indication of rule number, though not sure).