Thanks.
LVS tool is also ASSURA, and the LVS result is OK. It's TSMC 0.18um CMOS technology. For example, big means NF=36, L=0.18um, W=3um, RFNMOS; small means NF=10, L=0.18um, w=3um, RFNMOS. My problem is at the station of assura rcx. In the av_extraction view, I can see the parasitic capacitors and resistors in big RFNMOS, but not in the small RFNMOS. I don't want to extracte the parasitic parameters of the RF devices. I don't know why the same type device show different results during the assura rcx.
I also found that those extracted RF devices were specially connected, such as the bulk of the MOS were not connected the GND or neither terminal of RF capacitor was connected the GND, then assura rcx would extracted the parasitic parameters of those RF devices. Is there any optional or set of the assura rcx that I don't know? Please help me to deal with it. Thanks a lot.