design_oriented
Advanced Member level 4
Hi Guys,
Are there any good tutorials/books on CMOS photolithography process? I am aware of the basics but there are so many concepts apart from the basic ones like mask alignment, registration, etc. which are confusing.
What is the difference between alignment and registration? What are alignment offsets on reticle flashes?
Any help is greatly appreciated.
Thanks.
Are there any good tutorials/books on CMOS photolithography process? I am aware of the basics but there are so many concepts apart from the basic ones like mask alignment, registration, etc. which are confusing.
What is the difference between alignment and registration? What are alignment offsets on reticle flashes?
Any help is greatly appreciated.
Thanks.