dmsp8
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Hello
My goal is to create an air gap structure manually in the ICT file using the airgap{} syntax
What I observe in the VIEW ICT for example is that the air gaps are getting created right above metal2 in the metal2 dielectric instead of forming in the gap between the two metal 2 (inter layer dielectric)
I modified the parameters like elevation and so on but this doesnt seem to change. The other point is that I have only metal2 with the airgaps in my experiment, so all the other metal dielectrics are planar except metal2 diel.
Could someone please help me out here with suggestions. Thankyou
My goal is to create an air gap structure manually in the ICT file using the airgap{} syntax
What I observe in the VIEW ICT for example is that the air gaps are getting created right above metal2 in the metal2 dielectric instead of forming in the gap between the two metal 2 (inter layer dielectric)
I modified the parameters like elevation and so on but this doesnt seem to change. The other point is that I have only metal2 with the airgaps in my experiment, so all the other metal dielectrics are planar except metal2 diel.
Could someone please help me out here with suggestions. Thankyou
