[Moved]: un*cox for nmos3v in TSMC

[rey1991]

how to mesure un*cox for nmos3v in TSMC?

 

[erikl]

Re: un*cox for nmos3v in TSMC

how to mesure un*cox for nmos3v in TSMC?

You can calculate it from an I_ds current measurement in strong inversion and linear region from this equation:

\[I_{ds} = \frac {(\mu_n \cdot \, cox)}{2n} \cdot \, \frac {W}{L} \cdot \, (V_{gs}-V_{th})^2\]

For the substrate factor use n=1.35 ; V_gs is the necessary gate-source voltage for I_ds , V_th is the threshold voltage.