Hamed94
Junior Member level 1
Hi all,
I want to design and simulate passive components for TSMC's 65nm process. I have its substrate information, e.g. thickness and resistivity of the different metal layers, thickness and relative permittivity of the different dielectric layers and so on.
However, I didn't find substrate resistivity and loss, i.e. tanδ, of different dielectric layers.
How can I find these parameters?
Do you know any dissertations or Theses that can help me?
Thanks in advance
I want to design and simulate passive components for TSMC's 65nm process. I have its substrate information, e.g. thickness and resistivity of the different metal layers, thickness and relative permittivity of the different dielectric layers and so on.
However, I didn't find substrate resistivity and loss, i.e. tanδ, of different dielectric layers.
How can I find these parameters?
Do you know any dissertations or Theses that can help me?
Thanks in advance