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athena - oxidation profile

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pankaj jha

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i have done oxidation through diffusion .... i need to extract the locations (co-ordinates x,y) with a specified thickness of oxide(say, 120angstorm)... is there any command for this in Athena (silvaco).
 

You can use EXTRACT command in Athena to get geometrical and electrical information on your simulated/generated structure. Check with the manual or the examples provided with Athena installation.
 

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