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Impedance Matching at

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abhishek_rathod50

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I am interested in making a VHF matching box for the appliaction of Plasma Enhanced chemical Vapor Deposition(PECVD). The dimensions of the chamber is 3 feet by 3 feet. The power supply is at 70MHz and maximum power of 1.5KWatt. I am planning to use an L type network with vacuum capacitors. Any suggestions about it?
also I tried one matching box at the same specification, and I had an RF burn. Any ideas about that?
 

you should first measure the input impedance of your device (PECVD), after finding the s parameters you can use the ADS for designnig the matching network for it.
 

if you have any type of Network Analyzer you could read its manual in order to measuring the s parameters of youe device! see the agilent site! you could find a lot of great stuffs for this porpuse!
regards

www.agilent.com

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please press the help boton!!!! thanks
 

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