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Piezoelectric accelerometers is a subset of MEMS acceloremeters. Can you please provide a little more information?
An accelerometer works by measuring the displacement of a proof mass suspended on a "spring like beam" when accelerated. MEMS accelerometers means that entire arrangement is fabricated on a micro-scale. But there can be different ways to measure the displacement... You can do it by piezoelectric means, piezoresistive means or even capacitive means.
A piezoelectric accelerometers https://en.wikipedia.org/wiki/Piezoelectric_accelerometer can be made quite sensitive by using a large seismic mass. But in contrast to usual MEMS accelerometers, it can't detect static gravitation.
Sensitivity of any accelerometer can be increased by using a larger mass. MEMS accelerometers can be made employing piezoelectric sensors although it will suffer from the said issue.
Reference: "An introduction to microelectromechanical systems engineering", Nadim Maluf et al. [Chapter: MEM Structures and Systems in Industrial and Automotive Applications]
Your enclosed statement implies.. "Piezoelectric sensing is better than variable capacitance (VC) type of sensing in MEMS. "
This is completely different from your question.
Yeah. MEMS --> mechanical systems on a micro-scale. But the sensing needs to be done in someway or the other. In this case, it is either VC or piezoelectric.
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