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Gate dielectrics so thin that tunneling current is a thing.
Gates so short and VTs so low for performance tradeoff
that you can't fully choke the channel (maybe on high-VT
with L>min).
Technologies are now built for a "use model" and an application
segment. You can find ones that have less DC leakage and
maybe tolerate the lesser density and speed.
Hi,
Lowering the voltage maybe the wrong phrase to use, this creates confusion. One of the consequence of technology scaling is also the scaling of the supply. Like post#2 stated, this is in fact one of the reasons for leakages. In some applications where you can't trade-off size (speed) for power (Vth), in newer technologies there are specific models to choose from, e.g. CRN65LP (Low Power) and CRN65GP (General Purpose).
You see leakage is (mainly) a function of threshold voltage. you can notice this with low power models where they have higher Vth whereas General purpose models are lower.
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