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Transmission Lines in TSMC65nm

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Puppet123

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Hello,

I would like to make transmission lines in my TSMC65nm CMOS kit - it is a digital process and has no modeling transmission line elements.

How can I go about this - I have never done this before. I want to use the top 3 metals (RF metals) for the interconnect and ground.

Does anyone have screen captures, papers, or other resources on how I would draw this in Cadence ?

Thank you.
 

What is the frequency ? How long will the TL have ??
 

Using them for interconnect in mmwave layout. Want them to be 50 ohm lines and want to make a "family" of interconnect lengths, 5um, 10um, etc so that I can see the effects of them on my layouts.

The frequency is about 30 GHz.

Since this is a digital process there is no dedicated and modeled transmission line, so I need to make my own on the top RF metals.
 

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