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Using Agilent 4284 LCR Meter to measure parasitic capacitanc

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agilent 4284

Is it effective way using Aglient 4284 LCR meter to measure c-v characteristic of mosfet? Agilent 4155c/4156c also provides the function of c-v measurement of mosfet? is it any difference ? I have read the related manual, still confused a little bit.
 

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