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[SOLVED] in MOCVD for growth epitaxy how much MFC set special value ,for a special material?

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stackprogramer

stackprogramer

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hi,my friend.in MOCVD we have MFC that control flow of input gas.
my question is there a good reference that discuss about how to set MFC for gowthing epitaxy
GaN or other Material.a guide book .....
thanks for reply
 

Commercial GaN is now grown by MBE. MFC flows always are process (and temperature) dependent - and will not easily be published by the foundries.

G00GLE again is your friend to find literature/books about MOCVD processes.
 
thanks yes i heard that these experiment is not published.it is really bad...
so how we can start?with test and error. or accessing a master MOCVD....
 
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1. Try and find scientific publications. For more info you can always try and contact one of the authors
2. Patent specifications sometimes reveal some info
3. Equipment providers can give you info about individual process settings
4. Try and find scientific oriented university or government sponsored research labs which work with this technology
5. Try and error, if nothing else works
 
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