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Meet local metal density without using auto dummy metal fill, possible?

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flwong

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Dear friends, I am working in RF circuit design project using 65nm tech. There is strict requirement on local metal density. Auto-fill utility can help but greatly affect circuit performance. Manual dummy metal fill is used but it seems not very useful.

Any suggestion?
 

Why the manual metal fill is not useful for you and what exactly is affected by the automatic metal fill?
 

Why the manual metal fill is not useful for you and what exactly is affected by the automatic metal fill?

automatic fill will introduce large capacitive to my Power amplifier, while manual fill is seemed impossible as the metal density requirement can be fulfilled even all possible area are placed dummy metals.
 

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