Continue to Site

Welcome to EDAboard.com

Welcome to our site! EDAboard.com is an international Electronics Discussion Forum focused on EDA software, circuits, schematics, books, theory, papers, asic, pld, 8051, DSP, Network, RF, Analog Design, PCB, Service Manuals... and a whole lot more! To participate you need to register. Registration is free. Click here to register now.

what material is use for insulator for mim?

Status
Not open for further replies.

somayehbd

Newbie level 3
Joined
Nov 6, 2010
Messages
4
Helped
0
Reputation
0
Reaction score
0
Trophy points
1,281
Activity points
1,300
sio2 is better or nitride? why
what is diffrence between mim capacitor characteristics whit sio2 and whit nitride layer as insulator?
please help me:-:)-:)-(
 

Nitride will stand off more field, so give you more C density
for a given working voltage.

But it has some nasty charge behaviors as I recall.
Still people use it, maybe it's more a no-no as a MOS
gate dielectric than as a simple capacitor.

Si3N4 or SiO2 both are deposited dielectrics, in the
MIM context. You can also find, rarely, an Al2O3
native-grown dielectric on the bottom plate.
 

thanks for reply me
please tell me what is difference between sio2 and nitrid in deposition and difference between them in mim capasitior making
 

Status
Not open for further replies.

Part and Inventory Search

Welcome to EDABoard.com

Sponsor

Back
Top