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  1. #1
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    what material is use for insulator for mim?

    sio2 is better or nitride? why
    what is diffrence between mim capacitor characteristics whit sio2 and whit nitride layer as insulator?
    please help me

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  2. #2
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    Re: what material is use for insulator for mim?

    Nitride will stand off more field, so give you more C density
    for a given working voltage.

    But it has some nasty charge behaviors as I recall.
    Still people use it, maybe it's more a no-no as a MOS
    gate dielectric than as a simple capacitor.

    Si3N4 or SiO2 both are deposited dielectrics, in the
    MIM context. You can also find, rarely, an Al2O3
    native-grown dielectric on the bottom plate.



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  3. #3
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    Re: what material is use for insulator for mim?

    thanks for reply me
    please tell me what is difference between sio2 and nitrid in deposition and difference between them in mim capasitior making



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  4. #4
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    Re: what material is use for insulator for mim?

    please help me



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