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What is the RESURF in the high voltage process?

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What is the RESURF in the high voltage process?

Can you explain in detail about RESURF process & RESURF process development history

thanks.
 

This paper explains the RESURF (REduced Surface Electric Field) effect nicely:

**broken link removed**

The RESURF effect reduces the electric field in p-n junction using multi-dimensional (2D) depletion), and thus increases breakdown voltage.
 

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