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poly1-poly2 cap vs metal-poly cap

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Hi all,
Can anyone give me value/um^2 about the double poly cap and sandwhich cap(five metal and one poly) in 0.35um or 0.25um TSMC
process. Because I don't have the document on my hand.
And what's the consideration in selection between them, such as
area, noise etc, when design analog circuit.

Thanks in advance.
 

generally poly-poly cap will have higher density becuase the tox will be smaller. So, very, very effecient area wise. Also, they tend to be very linear, just like MiM or metal-metal caps (and unlike mos caps)
 

I got some information from engineer from TSMC.
In area consideration, the area of unit cap between
MiM and 1p5M sandwhich cap is close. But in the
accuracy consideration, MiM is much better than
sandwhich cap. So if we need high accuracy system,
we should use the MiM Process.
 

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