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Will metal fill or dummy metal be fabricated at foundry

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viswanadh_babu

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dummy metal fill site:edaboard.com

Hi every one,


1)Will the metal fills or dummy fills be fabricated at foundry ?
2) Is meeting the metal density requirement suggested by foundry, is mandatory ?

Note: we had filled metal density to the maximum extent possible in our layout , by using all options, but still there was stortage of density requirement


Reagrds,
Vb
 

Re: Will metal fill or dummy metal be fabricated at found

Yes metal fills and dummy fills will be fabricated.
 

Re: Will metal fill or dummy metal be fabricated at found

hai vak,

thanks for your reply.
But, i wanted to know whether it is compulsory to meet the requirement or will there be any tolerance for limit specified in DRD

regards,
vb
 

Re: Will metal fill or dummy metal be fabricated at found

ya that is mandatory.....because during procssing some of the effects like Erosion and Dishing can occur which leads to varying of R and C of metals....which can lead to timing problems ....
 
Re: Will metal fill or dummy metal be fabricated at found

It's all about your yield, foundry is just foundry, if you want, you can ask them to manufacture a PG short gds, as long as you pay for it. I used to tapeout a design with thousands of antenna violations to meet the TTM.
 

Hi,
Yes its very important to meet the density rules.
This takes care for variability caused due to CMP.
Since all models for layout exttraction may not take care for all these.
 
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