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Layout design for basic comb drive capacitive pressure sensor

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njo

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a very gud mrng. im actually an electronic student and im taking mems(microelectronic mechanical system) subject. as a fullfillment , i have to design a basic comb drive capacitive pressure sensor... after when thru some journal all , i couldnt find the layout design for this particular device. can anyone out thr who can help me ..... or can u ol give me a direction where n which web are prominent to do research on this subject... thank you so much
 

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