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  1. #1
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    Which metal is used for fabrication of contact and why ?

    Which metal is used for fabrication of contact and why ?

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    contact material???

    Copper is mostly used. It is efficient and not expensive. Gold is also used.



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    Re: contact material???

    tungsten is the best to prevent electromigration.



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    Re: contact material???

    Aluminum was used but it tends to oxidize...so polysilicon was used but it has very high resistivity...

    Tungsten contacts are less susceptible to oxidation than Al, and they also have higher annealing and melting temperatures...lower resistance than polysilicon....they have greater contact lifetime...

    it also depends on the type of designs you have and the process you're using


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  5. #5
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    Re: contact material???

    Quote Originally Posted by salma ali bakr
    Aluminum was used but it tends to oxidize...so polysilicon was used but it has very high resistivity...

    Tungsten contacts are less susceptible to oxidation than Al, and they also have higher annealing and melting temperatures...lower resistance than polysilicon....they have greater contact lifetime...

    it also depends on the type of designs you have and the process you're using
    very well said



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