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Lorentz, VPCM (or VPCD now) are good tools for 2.5D simulation. HFSS is 3D and is more accurate. HOwever, all the tools require some sort of calibration of the technology from measured data
I disagree with mike.
Momentum is widely used in MW companies to simulate planar inductors in the multiGHz range. It's level of accuracy is very high, PROVIDED THAT MATERIALS ARE WELL CHARACTERIZED AND MODELIZED.
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