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    full-wheat stone bridge Pt-thin film-strain guages on 5x5 sq. mm Si chip

    hallo, i intend to measure the residual stresses in the miltilayer structure of MEMS. the concept of pressuer sensors is applied here by surface machining four 40 nm thick Pt maender strain guages connected as full whaet stone bridge. with teh same dimension two act as longitudional and two as...

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