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What is the significance of double dummy poly on both sides for every transistor?

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cmoslayoutguide

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What is the significance of double dummy poly on both sides for every transistor?

Is it just to reduce the effect the of STI ?
 

Re: Double dummy poly in deep submicron technologies

cmoslayoutguide said:
Is it .... to reduce the effect the of STI ?
Click to expand...

Yes, and additionally to allow for a consistent environment if matching is important.
 
Re: Double dummy poly in deep submicron technologies

erikl said:
Yes, and additionally to allow for a consistent environment if matching is important.
Click to expand...



These dummy polys will help to prepare the mask or these are also part of process poly?
 

Re: Double dummy poly in deep submicron technologies

cmoslayoutguide said:
These dummy polys will help to prepare the mask or these are also part of process poly?
Click to expand...

They are processed like any other poly, i.e. they are real existent. That's the best way to provide a consistent environment in the surroundings - as well as relieving STI stress (mainly due to the additional distance).
 

Re: Double dummy poly in deep submicron technologies

cmoslayoutguide said:
What is the significance of double dummy poly on both sides for every transistor?

Is it just to reduce the effect the of STI ?
Click to expand...

poly is formed by Uv light. duo to diffraction at grid of UV light. another gate will form near to actual gate . to avoid that we r placing dummy poly . this will cancel the additional poly by distractive interferes
 
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Re: Double dummy poly in deep submicron technologies

Hi velkumargn


Could you just brief about what you said ?


Regards
Kishan.B
 

Re: Double dummy poly in deep submicron technologies

193nm lithographic process near UV light grid light will diffracted, so UV will go and form gate at some other place. If drain or source will come that place additional device will form with DRC. to avoid that we add dummy poly . Due to distractive interference it will cancel each other
 

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