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the antenna is implemented on the last metal layer (the same layer used for coils). You say that epi layer process can be selective, and hence avoid to introduce epi layer under the antenna?
The dipole antenna is etched over the oxide (SiO2) and between the oxyde and the Silicon substrate their is a thin layer called "Epitaxial layer".
This layer is conductive, and its conductivity makes the radiating efficiency of the antenna falling down.
Th epitaxial layer is needfull to realize...
Imagine that we try to integrate antennas over silicon chips. We know that epitaxial layer has conductivity that makes the radiating effeciency of the antenna falling down. What do you think about a method that acraps the epitaxial layer to reduce its influence upon the radiating effeciency of...
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