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I have done some work about simulating CPW lines in Momentum. I think for CPW simulation in momentum, Single Mode port with a Reference Offset maybe needed to get a more accurate result.
Be careful of the backvia, you may need to via properly as NOT to general unwant mode at the input port, or...
If your layout is as the attached, you need to map a slot layer on the substrate layer. and draw the red polygons on this layer.
To check the layout, you could use EMDS-> 3D EM preview to see the real layout.
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