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The Mode calculator is used to check the existence mode number of floquet mode in different frequency and scan angles situations. This is just a setting reference, and don't impact the simulation. Changing the theta and phi in phase delay of slave boundary can simulate the oblique incidence...
Try to increase the maximum pass number. I don't encounter this problem, the simulation with angle variation is the same as the normal incidence. The memory should be enough in the simulation.
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