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Hello All,
I am interested in knowing what would be the best method of grounding if I am using multiple number of power generator for an application. The power range is upto 5 KW and I would be using 25 of them at the frequency of 13.56 MHz and 40.68 MHz.
One scheme is making use of copper...
modelling software
I am looking for a modelling the electric field behaviour (specially interested in Standing Waves Generated) in a Plasma Enhanced Chemical Vapor Depostion chamber. Any suggestion what software would be a nice choice for this kind of modelling
For 70MHz, RG393 (VF 0.694):
1/4 wavelength = 246/70 MHz = 3.514 feet long (electrical) x 0.694 VF = 2.43
1/4 wavelength is 2.43' or 29.26" so an odd
multiple is 3 x 29.26" or 87.8" length. Does this sound good?
I have a 70 Mhz VHF generator having maximum power rating of 1.5KW. The generator is connected to the matching box with a coaxial cable. The matching box is connected directly to the plasma chamber.
The question that I had was what should be the length of the cable from the generator to the...
What is the nature of plasma impedance. Is it capacitive or inductive? I am talking about the applications related to Plasma enhanced chemical vapor deposition (PECVD). The operating frequency is 70MHz.
What is the nature of plasma impedance. Is it capacitive or inductive? I am talking about the applications related to Plasma enhanced chemical vapor deposition (PECVD).
I am interested in making a matching box at the frequency of 70MHz for a VHF power supply. The application is plasma enhanced CVD or a sputtering chamber. The chamber size is 1 * 3 feet. The power supply can deliver a maximum of 1.5KWatts. I want some help regarding the simulator to estimate the...
I am interested in making a VHF matching box for the appliaction of Plasma Enhanced chemical Vapor Deposition(PECVD). The dimensions of the chamber is 3 feet by 3 feet. The power supply is at 70MHz and maximum power of 1.5KWatt. I am planning to use an L type network with vacuum capacitors. Any...
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