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The difference between IC and MEMS fabrication methods

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karthik_reddy00

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fabrication

what is the difference between IC fabrication & MEMS fabrication methods
 

Re: fabrication

The big difference is that both are totally different technologies.

Both can use similar process steps like lithography, spin-coating, etching techniques... Although the order in wich these process steps are applied, the duration of baking processes, materials used... can differ much between the technology in question. A technology is actually the name for the variation in process steps, used materials...

I hope this helped you...
 

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