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I'm not very clear bout your question, but the accuracy of the capacitor matchig usually affected by yuor design.
Well generally 0.25 and 0.35 tech using BSIM3 parameter, in my opinion it's only moderate accuracy.
From what I've done, the smaller the technology are the better the result will be..but it's only on the layout hierachy. Submicron tech will introduce more 2nd-ry effect.
You should be careful because the design rules for 0.24 and 0.35 tech is quit differ. The same layout won't do.
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