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Coupling Capacitance between two different metal layers

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identical

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Is the coupling capacitance between two paths on the same metal layer (Say M2 and M2) larger than the coupling capacitance between two paths on different metal layers (Say M2 and M4)? If so, how can this be shown mathematically?
 

Is the coupling capacitance between two paths on the same metal layer (Say M2 and M2) larger than the coupling capacitance between two paths on different metal layers (Say M2 and M4)? If so, how can this be shown mathematically?

depends on the technology, width, insulator material, etc etc etc. when two metals sit side by side on the same layer, the effective A of the capacitor plates is proportional to the metal height. when talking about metals on different layers, the effective A is proportional to the width.
 

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