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    UMC 28nm process poly density checking window

    Is there anyone who's used UMC 28nm for analog circuit before?
    In this process, the POLY high density checking window is 1mmX1mm stepping 500um, is that possible? It's a big question mark.

    •   Alt10th January 2017, 15:13

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    Re: UMC 28nm process poly density checking window

    I'd think it's 500nm - but I don't have the docu.



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    Re: UMC 28nm process poly density checking window

    Quote Originally Posted by erikl View Post
    I'd think it's 500nm - but I don't have the docu.
    In their design manual, it says so. I pretty much doubt the PDK they provide is not complete.



    •   Alt11th January 2017, 09:42

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    Re: UMC 28nm process poly density checking window

    This I believe is only a crude rules-check window to
    ensure that alignable pattern exists no matter where
    the machine "looks". The step can be as crude as the
    size of the aligner field-of-view (or maybe half, just to
    be safe).

    Scanning the database at 500nm, X times Y, would be
    a huge and unwelcome amount of crunch-time.



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    Re: UMC 28nm process poly density checking window

    Quote Originally Posted by dick_freebird View Post
    This I believe is only a crude rules-check window to
    ensure that alignable pattern exists no matter where
    the machine "looks". The step can be as crude as the
    size of the aligner field-of-view (or maybe half, just to
    be safe).

    Scanning the database at 500nm, X times Y, would be
    a huge and unwelcome amount of crunch-time.
    Thanks for the explaination. Unfortunately, we didn't find other rules for high poly density checking in this process than this rule.
    Do you mean that we can't rely on this rule for doing the high poly density checking?



    •   Alt11th January 2017, 20:15

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    Re: UMC 28nm process poly density checking window

    I don't think the window matters, within each window
    "step" there ought to be a density check done and
    all must pass. Might inspect the next layer of this,
    within the window what density criterion is called
    out and does this criterion match what you see or
    expect?



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    Re: UMC 28nm process poly density checking window

    Quote Originally Posted by dick_freebird View Post
    I don't think the window matters, within each window
    "step" there ought to be a density check done and
    all must pass. Might inspect the next layer of this,
    within the window what density criterion is called
    out and does this criterion match what you see or
    expect?
    why does TSMC have 50ux50u of high poly density checking window then? I think it improves the yield.



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    Re: UMC 28nm process poly density checking window

    Quote Originally Posted by hotgu View Post
    why does TSMC have 50ux50u of high poly density checking window then? I think it improves the yield.
    window matters because of IP density versus chip density. that is the summary.
    but reality is that it is so much more complicated than that in advanced technologies. poly is gridded, regular, and always occuring. you actually draw poly cuts for places where you don't want poly.



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