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Parasitic extraction of a metal square in cmos process

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Hi, I want to find the parasitic of a metal square of given area in a cmos process (tsmc65nm) using regular lvs, xrc flow. But i do not have a schematic for this metal for lvs, xrc.

Some people suggest about using lvsres. But I do not know if it exists for tsmc65nm process. If it exists then what is layout and schematic name for M9?
 

Make a trivial schematic with at least one pin and one
wire. There's your metal schematic. Put the same pin
name on your 1-square layout. See if you can get the
analog extraction to complete with such a trivial case,
you may need to work with pruning of useless nets and
so on.

Or, make a slightly more real layout & schematic with
components connected by this wire. Then dig into the
extracted netlist for the tiny capacitors attached to
that node.
 

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