Continue to Site

Welcome to EDAboard.com

Welcome to our site! EDAboard.com is an international Electronics Discussion Forum focused on EDA software, circuits, schematics, books, theory, papers, asic, pld, 8051, DSP, Network, RF, Analog Design, PCB, Service Manuals... and a whole lot more! To participate you need to register. Registration is free. Click here to register now.

Core device orientation in 28 nm

Status
Not open for further replies.

analayout

Advanced Member level 4
Joined
Feb 20, 2007
Messages
101
Helped
10
Reputation
20
Reaction score
1
Trophy points
1,298
Activity points
1,844
Hi All,

In 28 nm process the core device should be placed in same orientation.
Why is it required ?

regards,
Analayout
 

I think this is necessary to keep the documented model accuracy regarding mismatch, i.e. is very advisable for devices which have to match rather well - as in larger geometry processes, too. In these low size sub-micron processes this is getting more and more important, because of a relative increase of mask adjustment and lithography deviations, and - last not least - the erratic distribution of dopant atoms.
 

There seems to have recently appeared (I do not watch closely,
may not be -that- new) mask techniques revolving about what
they call "1-D layout". Idea being that if you constrain all poly
(say) to run N-S, and active E-W, you can do a better job at
lithography than allowing all kinds of orientation randomness.
The DSM nodes will take any help they can get.
 

I heard it is some thing related to wavelength of the light source used in photolithography.
 

Status
Not open for further replies.

Part and Inventory Search

Welcome to EDABoard.com

Sponsor

Back
Top