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The limit is usually dielectric breakdown. The best case is the maximum field between the walls and the gas inside. Real cavities have manufacturing defects with share corners which reduce the voltage required for breakdown. Unless you are involved in a very high power pulsed RADAR other parts of the system limit the power.
There are some useful papers about this problem.
I don't have theirs. May be anyone can upload this material:
A simplified analysis for high power microwave bandpass filter structures
Sivadas, A.; Ming Yu; Cameron, R.;
Microwave Symposium Digest., 2000 IEEE MTT-S International , Volume: 3 , 11-16 June 2000
Pages:1771 - 1774 vol.3
Analysis of power handling capacity of band pass filters
Chi Wang; Zaki, K.A.;
Microwave Symposium Digest, 2001 IEEE MTT-S International , Volume: 3 , 20-25 May 2001
Pages:1611 - 1614 vol.3
Prediction of peak internal fields in direct-coupled-cavity filters
Ernst, C.; Postoyalko, V.;
Microwave Theory and Techniques, IEEE Transactions on , Volume: 51 , Issue: 1 , Jan. 2003
Pages:64 - 73
That's right.
I think the maximum allowable field must take the shape of filter cavity and resonator pole into account , and not the breakdown field strength in air(30Kv/m).
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