wave-maniac
Full Member level 3
tsmc 0.18um process
I'm looking for TSMC 0.18um process parameters, such as the thickness of metal layers, permittivity and permeability of substrate, oxide layers, etc. I need the info to set up a 3D simulation for spiral inductors. Any help would be gratefully appreciated.
I'm looking for TSMC 0.18um process parameters, such as the thickness of metal layers, permittivity and permeability of substrate, oxide layers, etc. I need the info to set up a 3D simulation for spiral inductors. Any help would be gratefully appreciated.