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interconnect resistance

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Eman kamel

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thanks for your help
i have another questions
i calculate the interconnect resistance by unit length for 45 nm technology
by the equation

Rinterconnect = Resistivity/(Thickness * Width)
i am using Metal Resistivity value 1.688e-2 ohm.micro meter
Thickness = 0.280 micro meter
Width =140 micrometer
i got R interconnect 0.0004 ohm/micro meter, while i found it in litreature to be in range of .04 ohm /micro meter
what do you think make this difference??
thanks in advance
Eman
 

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