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MIM capacitor (metal-insulator-metal) as used in integrated circuits.
This is simply a parallel plate capacitor with a thin isolator between the plates. For PCB, the typical dielectric is rather thick, so that the capacitance values are small. But if you need small capacitance values, this might be an option.
To get started, just use parallel plate capacitor equation and calculate the area that you need for a given C value.
To include the distributed effect, you can use a circuit model for broad side coupled lines. Maybe the SBCLIN will work, if you use a large value for S.
As Tony said, you can also use Momentum or another EM simulator for the final analysis.
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