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Gate Work function engineering in advanced CMOS Technologies

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anandrathi13

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Why is the work function approach necessary for Vt adjustment in scaled technologies?
What is a FUSI process?
How does nitrogen and other doping schemes help in adjusting the work function?
What are midgap metals?
What are the issues with midgap metals in the Vt adjustment of n-MOS and p-MOS, poly SiGe gates,
future directions of this research
 

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